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Advanced Gas Detection for Semiconductor Fabrication Facilities

Precision Monitoring for Cleanroom Environments

The Challenge

Ensuring safety from toxic gases in semiconductor facilities is critical.

Semiconductor manufacturing facilities face significant safety challenges due to the use of various toxic gases such as hydrogen, hydrogen bromide, and hydrogen peroxide. These gases can pose severe health risks to staff and can disrupt production processes if not properly monitored. Hydrogen is highly flammable and can cause explosions. Hydrogen bromide, used in etching processes, is highly toxic and corrosive. Hydrogen peroxide, used in cleaning processes, can be harmful if inhaled in high concentrations. Additionally, nitric oxide and ozone used in various processes can cause severe respiratory issues and other health problems.

Common Toxic Gases and Their Hazards:

  • Hydrogen (H2): Highly flammable, posing significant explosion risks.
  • Hydrogen Bromide (HBr): Highly toxic and corrosive, causing severe health issues.
  • Hydrogen Peroxide (H2O2): Harmful if inhaled in high concentrations, causing respiratory distress.
  • Nitric Oxide (NO): Causes severe respiratory issues and other health problems.
  • Ozone (O3): Harmful if inhaled, causing respiratory problems.

Challenges for Semiconductor Manufacturing Safety Professionals:

  • Complex Monitoring Requirements: Managing multiple toxic gases, each with specific detection and safety protocols.
  • Equipment Sensitivity and Reliability: Ensuring detection equipment is accurate and reliable in a semiconductor environment.
  • Compliance and Regulations: Meeting stringent industry safety standards and regulatory requirements demands significant effort and resources.
  • Risk Mitigation: Proactively identifying and addressing gas exposure risks to protect staff and ensure smooth production processes.
  • Operational Downtime: Preventing gas leaks and detection system failures to avoid interruptions in semiconductor manufacturing.

The Solution

Interscan is your partner in semiconductor manufacturing safety.

Interscan’s gas detection systems are specifically engineered to meet the demanding requirements of the semiconductor industry. Our advanced solutions provide precise, real-time monitoring of hazardous gases, ensuring the safety of your workforce and the continuity of your operations. With our SensorExpress™ subscription service, you benefit from rapid sensor replacements, maintaining continuous protection without interruptions.

Our systems feature automatic sensor delivery, active gas sampling for accurate detection, and high sensitivity to detect even the lowest levels of toxic gases, offering early warnings of potential issues. Trust Interscan to deliver dependable gas detection that supports your semiconductor manufacturing processes and upholds the highest safety standards in your facility.

Portable Gas Detection

GASD 8000

Portable Gas Detector

Elevate Safety Standards with the GasD® 8000 Portable Gas Monitor Read more... about GASD 8000

Fixed Gas Detection


Fixed Point Gas Detection

Precision Gas Detectors Tailored to Your Facility Read more... about AccuSafe

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